3-Axis Compact Automated Wet Bench – Supplied by Silicon Valley Sales
At Silicon Valley Sales, we proudly supply the 3-Axis Compact Automated Wet Bench by JST, a space-efficient solution for semiconductor cleanrooms demanding higher throughput and precision.
When managing space limitations and a demand for increased throughput, JST’s 3-Axis Compact Automated Wet Bench is ideal for bringing automation into current manual production cleanrooms. Its industry-leading compact footprint makes it a top choice in chip manufacturing environments.
3-Axis Compact Automated Wet Bench Overview
This powerful wet bench supports up to 200mm product size processing and is compatible with GaAs, InP, and other compound semiconductor or silicon substrates. It can perform all wet processing methods—wafer cleaning, stripping, and etching—within a smaller space while delivering accurate and repeatable results.
The compact three-axis linear transfer ensures stable, high-speed movement, while a programmable logic controller (PLC) and industrial PC manage the entire process. JST’s GENII software is accessible through an ergonomic 23″ touchscreen monitor, and local data logging allows full traceability of process parameters and lot tracking.
The bench is configurable with up to 14 process modules or baths and can handle acids, bases, and solvents in the same unit. With front load/unload access, easy maintenance via a front roll panel, and dual containment plenum, it offers both functionality and safety.
Key Features
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Up to 200mm processing capability
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Compact 3-axis linear transfer
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Configurable with 14 process modules
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Ergonomic design & front access
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24/7 Technical Support
Frequently Asked Questions
1. What makes the 3-Axis Compact Automated Wet Bench space-saving?
Its compact three-axis platform fits up to 14 baths in one station section.
2. What processes can it perform?
It handles wafer cleaning, stripping, and etching.
3. Which substrates is it compatible with?
GaAs, InP, and silicon substrates up to 200mm.
4. Can it handle multiple chemistries?
Yes, it supports acids, bases, and solvents in one unit.
5. Does JST provide technical support?
Yes, JST offers standard 24/7 Technical Support.
Request Info Today from Silicon Valley Sales
Upgrade your cleanroom efficiency with the 3-Axis Compact Automated Wet Bench—supplied by Silicon Valley Sales.
Request Info now and streamline your wafer processing with unmatched performance and precision!