MT Systems, Inc.
MT Systems, Inc. (also known as MicroTech Systems or MTS) has established itself as an acknowledged leader in the engineering, manufacturing, and application support of wet process and chemical distribution equipment.
MT Systems, Inc. | Wet Process Solutions
Manual, Semi-Automated, and Fully Automated Custom Wet Processing Equipment including Dry In – Dry Out
Surface Tension Gradient Dryer / Marangoni Motionless IPA / DI Water Dryer w/ Vacuum Pump Option
Fume Hoods to Enclosed Filtered Wet Stations ∙ Chemical Mixing/Distribution Systems ∙ Quartz Tube Cleaners
Orca Series Fully Automated Wet Process Station
Semi-Automated Acid/Solvent Stations
Vortex 2000 Fully Automated Intelligent Process System
Vertical Tube Wash
MicroTech 2, 3 or 4-Tank Servo Transfer Arm
Surface Tension Gradient Dryer (STG)
Orca Series Fully Automated Station
Quartz Vertical Tube Wash
Marangoni IPA Dryer
Semi-Automated Acid/Solvent
Stations
Vortex 2000 Fully Automated Station
White Papers & Technical Datasheets
White Papers
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Phosphoric Acid Nitride Removal
(PDF, 228k) -
Liquid Phase Deposition of Anti-Reflective Coatings (ARC) in Solar Applications Using an Intelligent Process Station™
(PDF, 1,045k) -
Pre-Diffusion Cleaning Critical Cleaning
(PDF, 126k) -
Alkaline Etching of Silicon
(PDF, 258k) -
Silicon Wafer Reclaim
(PDF, 85k) -
Photoresist Stripping Post Strip Cleaning
(PDF, 91k) -
Quick Dump Rinsing
(PDF, 232k) -
Solvent & Semi-aqueous Chemistry Applications
(PDF, 127k)
Technical Datasheets
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Orca Automated Wet Bench (PDF, 1,310k)
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Stingray Semi Automated Wet Bench
(PDF, 1,751k) -
Otter Manual Wet Bench
(PDF, 1,300k) -
Surface Tension Gradient Dryer (Marangoni Dryer or IPA Vapor Dryer)
(PDF, 1,012k) -
Tube Wash/Acid Cleaning System For Quartz Tubes
(PDF, 1,220k) -
Company Overview(PDF, 162k)
News & Press Releases
MicroTech Delivers Fully Automated Wet Process Systems to Telecommunications Company
ORCA Intelligent Process System (IPS) designed to clean specialty glass
Fremont, CA, November 13, 2014 – Silicon Valley wet process equipment supplier MicroTech recently delivered a shipment of multiple ORCA Fully Automated Intelligent Process Systems™ (IPS) to a diversified global telecommunications and manufacturing company in California.
MicroTech Delivers Horizontal Tube Washer to Semiconductor Supplier
Quartz tube wash system designed to reduce chemical and water usage and effluent costs
FREMONT, CA, May 29, 2014 –Silicon Valley wet process equipment manufacturer MicroTech has delivered its quartz tube washer to a leading edge company that provides precision cleaning to the semiconductor industry. The model MTS-QTW-2000 is an eight-foot horizontal tube washer that can accommodate quartz and SiC (silicon carbide) tubes and also clean liners, wafer boats, and small parts. Read more…
MicroTech Names Euris Semiconductor As Exclusive European Sales and Service Representative
FREMONT, CA, October 4, 2013 – Intelligent wet process equipment manufacturer MicroTech (MT Systems Inc.) has named Euris Semiconductor as their exclusive representative in Europe. Read more…
Specially designed robotics handles multiple processes in limited production floor space
FREMONT, CA, August 7, 2013 – A semiconductor manufacturer with very limited production floor space has received from MicroTech the Vortex 2000 Fully Automated Intelligent Process System (IPS™) custom designed with overhead robotics to accommodate the floor space issues while handling multiple processes. Read more…
MicroTech Receives Order for Mask Cleaning System from Touch Sensor Facility
Custom designed system automates cleaning process for extra large mask plates
FREMONT, CA, August 7, 2013 – A manufacturer of touch sensors has ordered a custom designed process system to clean large mask plates from MicroTech. The ORCA Intelligent Process System (IPS™) was specially designed to handle the extra weight of the plates, and the process tanks were custom designed for the larger size. The system will process mask plates larger than 450mm silicon wafers, the largest size previously available from MicroTech. Read more…
MicroTech Delivers Wet Process System to Medical Device Manufacturer
Custom designed system automates cleaning process for specialty surgery device
FREMONT, CA, April 30, 2013 – A Midwest medical device manufacturer has purchased from MicroTech it’s Stingray semi-automated intelligent wet process system with custom automation to clean their minimally invasive surgery (MIS) device. The wet process station was specially designed for ultra pure cleaning to address stringent medical industry contamination requirements. Read more…
MicroTech Delivers Automated Wafer Process System to Semiconductor Manufacturer in Texas
Custom designed, high throughput lift off system demonstrates increased ROI
FREMONT, CA, April 24, 2013 – A major Texas semiconductor manufacturer has purchased from MicroTech an ORCA Fully Automated Intelligent Process System (IPS) because of its ability to process wafers in a high throughput environment. Read more…
MicroTech to Deliver More Dryers to Major Semiconductor Discrete Manufacturer
Dryer’s ability to handle thin films on thin wafers with minimal contact or vibration is prime factor in sale
January 22, 2013, Fremont, CA – A major semiconductor discrete manufacturer has purchased an additional Surface Tension Gradient Dryer (STGD) from MicroTech because of its ability to dry thin wafers without damage to the wafer’s thin films. This is the second order to the manufacturer by MicroTech, a Silicon Valley wet process station supplier. Read more…
MicroTech Launches Solar Thin Film Production Tool Product Line
Low water consumption a major benefit; modules available for clean, develop, etch and ultrasonics process steps
January 18, 2013, Fremont, CA – MicroTech, a Silicon Valley wet process station supplier, has launched a product line specifically designed for high throughput processing of thin film solar cells. These cells can produce substantial cost reduction and cell integration by processing an entire array of solar cells on a single substrate. Read more…
Silicon Valley MEMS Manufacturer Purchases MicroTech Dryers
Multiple systems will be purchased over the next 12 months under terms of the contract
September 29, 2012, Fremont, CA – MicroTech has received an order for its Surface Tension Gradient Dryer from a manufacturer of MEMS devices in Silicon Valley. Do to confidentiality agreements, the name of the company cannot be disclosed. After many months of in-depth evaluation, the MEMS manufacturer made a unanimous decision to provide MicroTech with the Gradient Dryer contract. Quantity discounts will be provided to the company as they plan on purchasing multiple systems over the next 12 months. Read more…
Switching from dry process to wet produces lower capital and manufacturing costs, scalability, and better throughput
November 29, 2011, Fremont CA – MicroTech (MT Systems) has developed a wet process station for the etching of PSS (Patterned Sapphire Substrate) wafers used to increase light extraction and efficiency in high brightness LEDs. The wet station can improve manufacturing throughput, a major stumbling block to making LEDs price competitive with fluorescent lighting. Read more…
Deposition process replaces costly, hazardous CVD process resulting in less expensive, less environmentally harmful solar cells
October 17, 2011, Fremont CA – MicroTech (MT Systems Inc.) has delivered the first production ready intelligent process station for ARC (anti-reflective coating) solar cells. The wet process station uses Liquid Phase Deposition (LPD) technology, developed by Rice University and licensed exclusively to Natcore Technology, to grow coatings on silicon wafers used to produce solar cells. Read more…