Tigress XL Automated Wet Bench
The Tigress XL Automated Wet Bench offers a low-cost, adaptable, compact chemical wet bench platform. With minimum floor space and lower exhaust requirements, it delivers particle-free results through its dual-axis linear transfer system.
Engineered for tasks requiring three process modules and high throughput, this three-bath footprint system handles products up to 200mm in size. It supports Dry to Dry processing using JST’s Marangoni or STG Combo Rinse Dryer. It’s also compatible with any JST chemical or rinse process modules.
The system includes look-ahead scheduling software, allowing multiple lots with different recipes to be processed simultaneously, maximizing time, space, and productivity. An optional on-board chemical analyzer and concentration control reduce chemical usage and boost efficiency. It can also be customized beyond three modules for 150mm or smaller products.
Frequently Asked Questions
1. What is the footprint of the Tigress XL?
Three-bath compact design.
2. What product size is supported?
Up to 200mm; expandable for smaller wafers.
3. Does it allow Dry to Dry processing?
Yes, using JST’s Marangoni or STG Combo Rinse Dryer.
4. Can it process multiple recipes?
Yes, with look-ahead scheduling software.
5. Is maintenance easy?
Yes, and it includes 24/7 Technical Support.
Request Info from Silicon Valley Sales Today!
Ready to enhance your throughput with compact efficiency?
Request Info from Silicon Valley Sales today and bring the power of JST’s Tigress XL Automated Wet Bench to your lab!